The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 27, 2020
Filed:
Dec. 12, 2017
Applicant:
Apple Inc., Cupertino, CA (US);
Inventors:
Andreas Bibl, Los Altos, CA (US);
Paul A. Parks, Austin, TX (US);
Stephen P. Bathurst, Lafayette, CA (US);
Jon A. Williams, San Francisco, CA (US);
John A. Higginson, Santa Clara, CA (US);
Shenshen Zhao, San Jose, CA (US);
Assignee:
Other;
Primary Examiner:
Int. Cl.
CPC ...
B25J 15/00 (2006.01); H01L 21/677 (2006.01); H01L 21/683 (2006.01); H01L 21/67 (2006.01); H01L 21/68 (2006.01); B25J 7/00 (2006.01); B25J 15/04 (2006.01);
U.S. Cl.
CPC ...
B25J 15/0085 (2013.01); B25J 7/00 (2013.01); B25J 15/0033 (2013.01); B25J 15/0052 (2013.01); B25J 15/0408 (2013.01); H01L 21/67144 (2013.01); H01L 21/67288 (2013.01); H01L 21/67721 (2013.01); H01L 21/68 (2013.01); H01L 21/683 (2013.01);
Abstract
Structures and methods to actively control the shape of a micro pickup array (MPA) during micro device transfer are described. In an embodiment, a strain is applied to the MPA counteractive to strain arising during micro device transfer operations. For example, strain may be applied by a piezoelectric actuator element bonded to a back side of the base substrate to control a curvature of base substrate, and by extension the MPA.