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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 10814457 B1

PDFFull Text
Expired
Date of Patent:
Oct. 27, 2020

Filed:

Mar. 19, 2018

Gimbal for cmp tool conditioning disk having flexible metal diaphragm

Applicant:

Globalfoundries Inc., Grand Cayman, KY;

Inventors:

Sunghoon Lee, Rexford, NY (US);

Sung Pyo Jung, Loudonville, NY (US);

Eric J. Bodensieck, Schuylerville, NY (US);

Aldrin Bernard Anak Vincent Eddy, Halfmoon, NY (US);

Dinesh R. Koli, Mechanicville, NY (US);

Assignee:

GLOBALFOUNDRIES INC., Grand Cayman, KY;

Attorneys:

Francois Pagette

Hoffman Warnick LLC

Primary Examiner:

George B Nguyen

Int. Cl.
CPC ...
B24D 3/34 (2006.01); B24B 53/12 (2006.01); H01L 21/321 (2006.01); H01L 21/304 (2006.01); B24B 53/017 (2012.01); B24B 37/26 (2012.01);
U.S. Cl.
CPC ...
B24D 3/346 (2013.01); B24B 53/12 (2013.01); H01L 21/304 (2013.01); H01L 21/3212 (2013.01); B24B 37/26 (2013.01); B24B 53/017 (2013.01);
Abstract

A gimbal for a conditioning system for a CMP tool is configured to maintain a conditioning disk in contact with a polishing pad of the CMP tool. The gimbal includes an arm coupling for coupling to a conditioning swing arm of the CMP tool; and a disk holder for holding the conditioning disk. A flexible diaphragm extends between the arm coupling and the disk holder. The flexible diaphragm allows the disk holder to flex relative to the arm coupling. The flexible diaphragm is made of a metal or metal alloy.

Find Patent Forward Citations

Lee, Sunghoon. (2020). Gimbal for cmp tool conditioning disk having flexible metal diaphragm (U.S. Patent No. 10814457). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/10814457

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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