The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 20, 2020
Filed:
Sep. 13, 2016
Nikon Corporation, Tokyo, JP;
Jonathan K. Wells, San Francisco, CA (US);
Matthew D. Rosa, Fremont, CA (US);
Paul Derek Coon, Redwood City, CA (US);
Eric Peter Goodwin, Tucson, AZ (US);
Nikon Corporation, , JP;
Abstract
A measuring device () for monitoring movement of a first object relative to a second object, the first object or the second object including a target surface (), comprises a first image sensor combination (), a second image sensor combination (), and a control system (A). The image sensor combinations () capture first images and second images of the target surface () over time. The first image sensor combination () includes a first image sensor (A) and a first lens assembly (B). The second image sensor combination () includes a second image sensor (A), and a second lens assembly (B) having a second optical axis (BX) that is at an angle of between thirty degrees and sixty degrees relative to normal to the target surface (). The control system (A) analyzes the first images and the second images to monitor movement of the first object relative to the second object.