The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 20, 2020
Filed:
Feb. 07, 2018
Applicant:
Murata Manufacturing Co., Ltd., Nagaokakyo-shi, Kyoto-fu, JP;
Inventor:
Ville Kaajakari, Altadena, CA (US);
Assignee:
MURATA MANUFACTURING CO., LTD., Nagaokakyo-Shi, Kyoto-Fu, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H03H 9/00 (2006.01); H03H 9/24 (2006.01); H03H 9/02 (2006.01); H03H 9/10 (2006.01); G01C 19/5712 (2012.01); G04C 3/08 (2006.01);
U.S. Cl.
CPC ...
H03H 9/2452 (2013.01); H03H 9/02338 (2013.01); H03H 9/02362 (2013.01); H03H 9/02433 (2013.01); H03H 9/1057 (2013.01); H03H 9/2489 (2013.01); G01C 19/5712 (2013.01); G04C 3/08 (2013.01); H03H 9/2473 (2013.01); H03H 2009/0244 (2013.01); H03H 2009/02251 (2013.01);
Abstract
A micromechanical resonator is provided that enables a smaller total package size with an acceptable quality factor for timing applications. The MEMS resonator includes a vibration portion with a base and three or more vibrating beams extending therefrom. Moreover, the MEMS resonator includes a frame that surrounds a periphery of the vibration portion and a pair of anchor between the vibrating beams for stabilizing the vibration portion within the frame. Furthermore, support beams couple the base of the vibration portion to the pair of anchors.