The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 20, 2020
Filed:
Jun. 06, 2017
Sharp Kabushiki Kaisha, Sakai, Osaka, JP;
Katsunori Misaki, Yonago, JP;
Kunio Matsubara, Yonago, JP;
SHARP KABUSHIKI KAISHA, Sakai, Osaka, JP;
Abstract
A scanning antenna includes a TFT substrate, a slot substrate, and a liquid crystal layer. The TFT substrate includes a transfer terminal section including a patch connection section formed of the same low-resistance metal film as that of a patch electrode, a first protection metal layer formed on the patch connection section, and a first insulating layer including an opening partially exposing an upper face of the first protection metal layer. The slot substrate includes a terminal section including a slot connection section formed of the same low-resistance metal film as that of the slot electrode, a second protection metal layer formed on the slot connection section, and a second insulating layer including an opening partially exposing an upper face of the second protection metal layer. The first and second protection metal layers are each formed of at least one layer selected from the group consisting of a Ti layer, a MoNb layer, a MoNbNi layer, a MoNbN layer, and a MoNbNiN layer, and have a thickness of 18 nm or greater.