The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Oct. 20, 2020

Filed:

Feb. 11, 2019
Applicant:

Samsung Electronics Co., Ltd., Suwon-si, Gyeonggi-do, KR;

Inventors:

Seokcheon Baek, Hwaseong-si, KR;

Kwang-Soo Kim, Hwaseong-si, KR;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 27/11582 (2017.01); H01L 27/11565 (2017.01); H01L 27/1157 (2017.01); H01L 27/11573 (2017.01); H01L 29/423 (2006.01); H01L 23/522 (2006.01); H01L 23/528 (2006.01); H01L 27/11556 (2017.01); H01L 21/768 (2006.01); H01L 21/28 (2006.01);
U.S. Cl.
CPC ...
H01L 27/11582 (2013.01); H01L 21/76897 (2013.01); H01L 23/5226 (2013.01); H01L 23/5283 (2013.01); H01L 27/1157 (2013.01); H01L 27/11565 (2013.01); H01L 27/11573 (2013.01); H01L 29/40117 (2019.08); H01L 29/4234 (2013.01); H01L 27/11556 (2013.01);
Abstract

Three-dimensional semiconductor memory devices are provided. The devices may include a semiconductor layer and electrode structures on the semiconductor layer. The electrode structures may include a first electrode structure including a first electrode portion and a first pad portion and a second electrode structure including a second electrode portion and a second pad portion. Each of the first and second electrode portions has a first width, each of the first and second pad portions has a second width, and the second width may be less than the first width. The first and second electrode portions may be spaced apart from each other by a first distance, and the first and second pad portions may be spaced apart from each other by a second distance that may be greater than the first distance.


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