The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 20, 2020
Filed:
Sep. 08, 2017
Applicant:
Kawasaki Jukogyo Kabushiki Kaisha, Kobe-shi, Hyogo, JP;
Inventors:
Yasuhiko Hashimoto, Kobe, JP;
Tetsuya Yoshida, Kakogawa, JP;
Assignee:
KAWASAKI JUKOGYO KABUSHIKI KAISHA, Kobe, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/677 (2006.01); H01L 21/67 (2006.01); H01L 21/687 (2006.01); B65G 47/90 (2006.01);
U.S. Cl.
CPC ...
H01L 21/67742 (2013.01); B65G 47/90 (2013.01); H01L 21/67196 (2013.01); H01L 21/67748 (2013.01); H01L 21/67766 (2013.01); H01L 21/68707 (2013.01);
Abstract
A substrate transfer hand coupled to a robot arm includes a base part coupled to the robot arm; and a substrate holding part coupled to the base part to hold a substrate. When viewed in a substrate perpendicular line direction perpendicular to the substrate held by the substrate holding part, the substrate transfer hand is bent at a coupling portion at which the base part and the substrate holding part are coupled to each other or a region which is in the vicinity of the coupling portion, and the base part and the substrate transfer hand have a V-shape, as a whole.