The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 20, 2020
Filed:
May. 17, 2019
Applicant:
Applied Materials, Inc., Santa Clara, CA (US);
Inventors:
Julian G. Blake, Gloucester, MA (US);
Frank Sinclair, Boston, MA (US);
Assignee:
Applied Materials, Inc., Santa Clara, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 37/09 (2006.01); H01J 37/317 (2006.01);
U.S. Cl.
CPC ...
H01J 37/09 (2013.01); H01J 37/3171 (2013.01); H01J 2237/0213 (2013.01); H01J 2237/0473 (2013.01);
Abstract
An ion implanter. The ion implanter may include a beamline, the beamline defining an inner wall, surrounding a cavity, the cavity arranged to conduct an ion beam. The ion implanter may also include a low emission insert, disposed on the inner wall, and further comprising aC layer, theC layer having an outer surface, facing the cavity.