The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Oct. 20, 2020

Filed:

Jan. 11, 2019
Applicant:

Samsung Display Co., Ltd., Yongin-Si, Gyeonggi-Do, KR;

Inventor:

Inwoo Kim, Asan-si, KR;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03F 7/20 (2006.01); H01L 27/12 (2006.01); G03F 1/00 (2012.01); G03F 1/38 (2012.01); G02F 1/1362 (2006.01); G02F 1/1333 (2006.01);
U.S. Cl.
CPC ...
G03F 7/70475 (2013.01); G03F 1/144 (2013.01); G03F 1/38 (2013.01); G03F 7/70466 (2013.01); H01L 27/1251 (2013.01); H01L 27/1288 (2013.01); G02F 1/136209 (2013.01); G02F 2001/13625 (2013.01); G02F 2001/133354 (2013.01); G02F 2001/136222 (2013.01); G02F 2201/123 (2013.01); G03F 7/70433 (2013.01);
Abstract

An exposure mask includes an aligning portion and a boundary portion. The aligning portion may be aligned with pixel areas of a substrate and includes a first exposure member and a second exposure member. The boundary portion includes a first exposure element, a second exposure element, a third exposure element, and a fourth exposure element. The first exposure member, the first exposure element, and the second exposure element are positioned in a first row. The first exposure element is positioned between the first exposure member and the second exposure element and is larger than the second exposure element. The second exposure member, the third exposure element, and the fourth exposure element are positioned in a second row. The third exposure element is positioned between the second exposure member and the fourth exposure element and is smaller than the fourth exposure element. Each exposure member/element includes a light transmitter/blocker.


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