Differential polarisation imaging and imaging precision ellipsometry

Abstract

Methods and systems for imaging precision ellipsometry of a sample are provided. The method includes shining a source of linearly polarised light on a surface of the sample wherein light reflected off the surface of the sample has elliptic polarisation. The method further includes converting polarisation of the light reflected off the surface of the sample into linear polarisation suitable for a polarisation modulator by a retarder and oscillating a polarisation modulator to measure the polarisation rotation of the polarised light passing through the retarder. In addition, the method includes synchronising acquisition of images of the light from the retarder with oscillations of the polarisation modulator to acquire first array images during positive half-periods of oscillations of the polarisation modulator and to acquire second array images during negative half-periods of the oscillations of the polarisation modulator. Finally, the method includes differential image processing of the first array images and the second array images to generate difference images comprising a plurality of pixels, the value of each of the plurality of pixels in each of the difference images being proportional to the polarisation rotation of the light reaching the polarisation modulator from the sample.