The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 20, 2020
Filed:
Sep. 28, 2017
Applicant:
Sharp Kabushiki Kaisha, Sakai, Osaka, JP;
Inventors:
Koji Yamabuchi, Sakai, JP;
Shinsaku Nakajima, Sakai, JP;
Assignee:
SHARP KABUSHIKI KAISHA, Sakai, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 14/24 (2006.01); C23C 14/04 (2006.01); H01L 21/033 (2006.01); H01L 51/00 (2006.01);
U.S. Cl.
CPC ...
C23C 14/24 (2013.01); C23C 14/04 (2013.01); H01L 21/033 (2013.01); H01L 51/0001 (2013.01);
Abstract
A valid portion formed on a mask sheet is provided to extend across a plurality of active regions on a vapor target substrate. The valid portion includes a first region and a second region. The first region is provided in a shape corresponding to a shape of each of the active regions for each of the active regions. The second region is located outside the first region, and is provided with a covering portion configured to cover a plurality of vapor deposition holes.