The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Oct. 13, 2020

Filed:

May. 08, 2019
Applicant:

Elux Inc., Vancouver, WA (US);

Inventors:

Paul J. Schuele, Washougal, WA (US);

Changqing Zhan, Vancouver, WA (US);

Kenji Sasaki, West Linn, OR (US);

Kurt Ulmer, Vancouver, WA (US);

Jong-Jan Lee, Camas, WA (US);

Assignee:

ehux, Inc., Vancouver, WA (US);

Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
H01L 33/00 (2010.01); H01L 33/38 (2010.01); H01L 33/24 (2010.01);
U.S. Cl.
CPC ...
H01L 33/0093 (2020.05); H01L 33/0095 (2013.01); H01L 33/24 (2013.01); H01L 33/38 (2013.01);
Abstract

Planar surface mount (SM) micro light emitting diodes (μLEDs) are presented. The fabrication method provides a MOCVD LED structure with a stack including a first doped semiconductor in a first plane, a MQW layer overlying the first doped semiconductor in a second plane, and a second doped semiconductor overlying the MQW layer in a third plane. An electrical insulator is conformally deposited over the etched stack in a fourth plane, and etched to expose the second doped semiconductor, creating a first via. Etching exposes the first doped semiconductor, creating a second via. A first electrode is connected to the second doped semiconductor through the first via, and has a substrate interface surface in a fifth plane with an average planarity tolerance of less than 10 nanometers. A second electrode is connected to the first doped semiconductor through the second via, and has a substrate interface surface in the fifth plane.


Find Patent Forward Citations

Loading…