The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 13, 2020
Filed:
Feb. 11, 2019
Applicant:
Prilit Optronics, Inc., Tainan, TW;
Inventors:
Assignee:
Prilit Optronics, Inc., Tainan, TW;
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/683 (2006.01); H01L 21/308 (2006.01); B25J 15/06 (2006.01); H01L 33/00 (2010.01); H01L 21/033 (2006.01);
U.S. Cl.
CPC ...
H01L 21/6838 (2013.01); B25J 15/0616 (2013.01); H01L 21/0337 (2013.01); H01L 21/3086 (2013.01); H01L 33/005 (2013.01);
Abstract
A vacuum transfer device includes a semiconductor substrate, which has a first hole disposed in a top portion of the semiconductor substrate; a nozzle disposed in a bottom portion of the semiconductor substrate and protruding downward, the nozzle being aligned with the first hole; and a second hole disposed through the nozzle and in the semiconductor substrate to meet the first hole.