The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 13, 2020
Filed:
Feb. 23, 2018
Samsung Electronics Co., Ltd., Suwon-si, Gyeonggi-do, KR;
SAMSUNG ELECTRONICS CO., LTD., Suwon-si, Gyeonggi-do, KR;
Abstract
A semiconductor manufacturing apparatus including a transport head that includes a vacuum chuck, the vacuum chuck being configured to vacuum-hold light-emitting element chips; and a vacuum pump that is configured to provide a vacuum pressure to the transport head, wherein the vacuum chuck includes a porous material layer and a buffer layer on the porous material layer, and the buffer layer includes a plurality of protrusions and vacuum holes, the vacuum holes extending from a surface of the buffer layer that contacts the porous material layer to lower surfaces of the protrusions.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile