The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 13, 2020
Filed:
Sep. 16, 2015
Applicant:
Hitachi High-technologies Corporation, Tokyo, JP;
Inventors:
Souichi Katagiri, Tokyo, JP;
Keigo Kasuya, Tokyo, JP;
Assignee:
HITACHI HIGH-TECH CORPORATION, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 41/16 (2006.01); H01J 41/20 (2006.01); F04B 37/02 (2006.01); H01J 37/073 (2006.01); H01J 37/28 (2006.01);
U.S. Cl.
CPC ...
H01J 41/20 (2013.01); F04B 37/02 (2013.01); H01J 37/073 (2013.01); H01J 37/28 (2013.01); H01J 41/16 (2013.01); H01J 2237/1825 (2013.01); H01J 2237/28 (2013.01);
Abstract
In a vacuum apparatus including an ultrahigh vacuum evacuation pump, the ultrahigh vacuum evacuation pump is provided with a rod-shaped cathode including a non-evaporable getter alloy, a cylindrical anode disposed so as to surround the cathode, and a coil or a ring-shaped permanent magnet disposed so as to sandwich upper and lower openings of the cylindrical anode and surround the rod-shaped cathode. As a result, it is possible to reduce the size and weight of the ultrahigh vacuum evacuation pump and to dispose the vacuum evacuation pump at a desired location in the vacuum apparatus.