The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 13, 2020
Filed:
Sep. 10, 2018
Toshiba Memory Corporation, Minato-ku, JP;
Kenji Wakisaka, Yokkaichi, JP;
Osamu Nagano, Nagoya, JP;
TOSHIBA MEMORY CORPORATION, Minato-ku, JP;
Abstract
An imaging portion acquires first sample-images of a first sample under optical-conditions, the first sample having a defect, and acquires second sample-images of a second sample under optical-conditions, the second sample having no defects. An arithmetic portion calculates a first difference between a first sample-image taken under a first optical-condition and the first sample-image taken under a second optical-condition, calculates a second difference between a second sample-image taken under the first optical-condition and a second sample-image taken under the second optical-condition, and selects the first and second optical-conditions under which a difference between the first and second differences becomes largest, as a first and a second inspection-condition. The imaging portion takes images of the target to be inspected under the first and second inspection-conditions to acquire a first and second inspection-images. The arithmetic portion performs inspection based on the difference between the first and second inspection-images.