The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 13, 2020
Filed:
Jan. 16, 2019
Applicant:
Nikon Corporation, Tokyo, JP;
Inventors:
Assignee:
NIKON CORPORATION, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G02B 21/06 (2006.01); G01N 21/64 (2006.01); G01B 21/00 (2006.01); G02B 21/36 (2006.01); G02B 27/58 (2006.01); G02B 21/00 (2006.01);
U.S. Cl.
CPC ...
G02B 21/06 (2013.01); G01N 21/648 (2013.01); G01N 21/6458 (2013.01); G02B 21/0032 (2013.01); G02B 21/0076 (2013.01); G02B 21/367 (2013.01); G02B 27/58 (2013.01);
Abstract
A structured illuminating apparatus includes a branching unit branching an exit light flux from a light source into at least two branched light fluxes, an illuminating optical system making the two branched light fluxes to be respectively collected at mutually different positions on a pupil plane of an objective lens and making the two branched light fluxes to be interfered with each other to illuminate a specimen with an interference fringe of the two branched light fluxes, and an adjusting unit adjusting a height from an optical axis of the illuminating optical system to two collecting points formed on the pupil plane of the objective lens by the two branched light fluxes.