The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Oct. 13, 2020

Filed:

Apr. 18, 2018
Applicant:

Nikon Corporation, Tokyo, JP;

Inventors:

Norio Miyake, Tokyo, JP;

Fumio Suzuki, Yokohama, JP;

Hiroaki Nakayama, Kawasaki, JP;

Assignee:

NIKON CORPORATION, Tokyo, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G02B 21/06 (2006.01); G02B 21/00 (2006.01); G02B 27/09 (2006.01); G02B 3/00 (2006.01); G02B 21/08 (2006.01); G03B 21/625 (2014.01);
U.S. Cl.
CPC ...
G02B 21/06 (2013.01); G02B 3/0056 (2013.01); G02B 21/0088 (2013.01); G02B 21/082 (2013.01); G02B 27/0905 (2013.01); G02B 27/0961 (2013.01); G03B 21/625 (2013.01);
Abstract

A microscope including an illumination optical system having an objective lens and a fly-eye lens, where: the fly-eye lens having a plurality of lens elements; in the illumination optical system, images of the plurality of lens elements are projected on a pupil of the objective lens; and the number (n) of the images of the lens elements projected inside the pupil of the objective lens is more than the number (n) of the images of the lens elements projected on an outer perimeter of the pupil of the objective lens. In the above observation optical system, a first objective lens having a first pupil diameter and a second objective lens having a pupil diameter larger than the first pupil diameter are switchable, and a number nmay be greater than a number nwith respect to the first objective lens.


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