The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Oct. 13, 2020

Filed:

Oct. 26, 2016
Applicant:

Mitsubishi Electric Corporation, Tokyo, JP;

Inventors:

Naoto Kaguchi, Tokyo, JP;

Yuji Ebiike, Tokyo, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01R 1/073 (2006.01); G01R 1/04 (2006.01); G01R 1/067 (2006.01); G01R 31/26 (2020.01); G01R 31/28 (2006.01); H01L 21/66 (2006.01);
U.S. Cl.
CPC ...
G01R 1/073 (2013.01); G01R 1/0441 (2013.01); G01R 1/06722 (2013.01); G01R 31/26 (2013.01); G01R 31/28 (2013.01); H01L 22/30 (2013.01);
Abstract

An inspection device according to the invention of the present application includes a fixing plate, plural expanding and contracting portions whose one ends are fixed to the fixing plate, plural contact probes that are fixed to the other ends of the plural expanding and contracting portions respectively, and plural fixing portions which are provided to the plural contact probes respectively, wherein each fixing portion performs switching between a fixing state where an upper end of a corresponding contact probe is fixed at a first position and a releasing state where the contact probe is not fixed, the contact probe is pulled to the fixing plate by a corresponding expanding and contracting portion under the fixing state, and the upper end of the contact probe is placed at a second position closer to the fixing plate than the first position under the releasing state.


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