The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 13, 2020
Filed:
Mar. 28, 2018
Shimadzu Corporation, Kyoto, JP;
Masahiro Ohta, Kyoto, JP;
Shimadzu Corporation, Kyoto, JP;
Abstract
A scanning probe microscope includes a position change unit that relatively changes positions of a fixed end of a cantilever and a surface of a sample S in a Z direction, a deflection amount measurement unit that measures a deflection amount of the cantilever, a Z direction movement distance detector that detects a movement distance in the Z direction while the fixed end is relatively moved with respect to the surface of the sample S from a predetermined initial position until a tip of a probe comes into contact with the surface of the sample S and the deflection amount becomes a predetermined value, and an initial position change unit that changes the initial position to a position further away from the surface of the sample S when the movement distance is below a predetermined lower limit.