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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 10801981 B1

PDFFull Text
Date of Patent:
Oct. 13, 2020

Filed:

Dec. 12, 2018

Gas sensor, sensor array, and manufacturing method thereof

Applicant:

Hefei Micro Nano Sensing Technology Co., Ltd., Hefei, CN;

Inventors:

Lei Xu, Hefei, CN;

Shufeng Peng, Hefei, CN;

Dongcheng Xie, Hefei, CN;

Ruiying Zhou, Hefei, CN;

Assignee:

HEFEI MICRO NANO SENSING TECHNOLOGY CO., LTD., Hefei, CN;

Attorney:

Bayramoglu Law Offices LLC

Primary Examiner:

Daniel S Larkin

Int. Cl.
CPC ...
G01N 27/12 (2006.01); B81B 3/00 (2006.01); B81C 1/00 (2006.01);
U.S. Cl.
CPC ...
G01N 27/123 (2013.01); B81B 3/0037 (2013.01); B81C 1/0015 (2013.01); B81B 2201/0214 (2013.01); B81B 2203/0118 (2013.01); B81B 2203/04 (2013.01); B81C 2201/0105 (2013.01); B81C 2201/0132 (2013.01); B81C 2201/0133 (2013.01); B81C 2201/0176 (2013.01);
Abstract

A gas sensor includes a silicon substrate, a detecting electrode, a first isolation film, a heating resistor, and a second isolation film that are successively stacked. The gas sensor has a base structure and a cantilever structure with a curled free end, and a gas sensitive material is provided on the end of the cantilever structure. A sensor array composed of the gas sensor, and a method for manufacturing the gas sensor are also provided. The method includes (1) selecting a sacrificial layer; (2) preparing a detecting electrode; (3) preparing a first isolation film; (4) preparing a heating resistor; (5) preparing a second isolation film; (6) releasing the membrane; and (7) loading the gas sensitive material.

Find Patent Forward Citations

Xu, Lei. (2020). Gas sensor, sensor array, and manufacturing method thereof (U.S. Patent No. 10801981). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/10801981

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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