The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Oct. 13, 2020

Filed:

Sep. 20, 2017
Applicant:

Pioneer Corporation, Tokyo, JP;

Inventors:

Takanori Ochiai, Kawagoe, JP;

Masakazu Ogasawara, Kawagoe, JP;

Assignee:

PIONEER CORPORATION, Tokyo, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01N 21/3586 (2014.01); G01B 11/06 (2006.01); G01B 15/02 (2006.01); G01B 11/00 (2006.01);
U.S. Cl.
CPC ...
G01N 21/3586 (2013.01); G01B 11/00 (2013.01); G01B 11/06 (2013.01); G01B 11/0658 (2013.01); G01B 11/0666 (2013.01); G01B 15/02 (2013.01);
Abstract

An inspection apparatus is provided with: an irradiating device configured to irradiate a sample in which a plurality of layers are laminated with a terahertz wave; a detecting device configured to detect the terahertz wave from the sample to obtain a detected waveform; and an estimating device configured to estimate a position of a first boundary surface on the basis of a second boundary surface pulse wave and a library, the second boundary surface pulse wave appearing in the detected waveform to correspond to a second boundary surface that is farther from an outer surface than the first boundary surface, the library representing an estimated waveform of the terahertz wave from the sample.


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