The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Oct. 06, 2020

Filed:

Nov. 09, 2017
Applicant:

Hamamatsu Photonics K.k., Hamamatsu-shi, Shizuoka, JP;

Inventors:

Fumitsugu Fukuyo, Hamamatsu, JP;

Kenshi Fukumitsu, Hamamatsu, JP;

Naoki Uchiyama, Hamamatsu, JP;

Toshimitsu Wakuda, Hamamatsu, JP;

Assignee:

HAMAMATSU PHOTONICS K.K., Hamamatsu-shi, Shizuoka, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B23K 26/00 (2014.01); B23K 26/02 (2014.01); H01L 21/78 (2006.01); B23K 26/53 (2014.01); B23K 26/16 (2006.01); B23K 26/0622 (2014.01); B23K 26/066 (2014.01); B23K 26/40 (2014.01); B23K 26/364 (2014.01); B23K 20/02 (2006.01); B23K 20/16 (2006.01); B23K 20/233 (2006.01); B23K 20/26 (2006.01); B23K 26/03 (2006.01); B23K 26/046 (2014.01); B23K 26/073 (2006.01); B23K 26/08 (2014.01); B28D 5/00 (2006.01); C03B 33/023 (2006.01); C03B 33/08 (2006.01); C03B 33/10 (2006.01); C03C 23/00 (2006.01); B23K 101/40 (2006.01); B23K 103/00 (2006.01); G02F 1/1368 (2006.01); H01L 21/683 (2006.01);
U.S. Cl.
CPC ...
H01L 21/78 (2013.01); B23K 20/023 (2013.01); B23K 20/16 (2013.01); B23K 20/233 (2013.01); B23K 20/26 (2013.01); B23K 26/03 (2013.01); B23K 26/032 (2013.01); B23K 26/034 (2013.01); B23K 26/046 (2013.01); B23K 26/066 (2015.10); B23K 26/0624 (2015.10); B23K 26/073 (2013.01); B23K 26/0853 (2013.01); B23K 26/16 (2013.01); B23K 26/364 (2015.10); B23K 26/40 (2013.01); B23K 26/53 (2015.10); B28D 5/0011 (2013.01); C03B 33/023 (2013.01); C03B 33/082 (2013.01); C03B 33/102 (2013.01); C03C 23/0025 (2013.01); B23K 2101/40 (2018.08); B23K 2103/50 (2018.08); B65G 2249/04 (2013.01); G02F 1/1368 (2013.01); H01L 21/6836 (2013.01); H01L 2221/68327 (2013.01); Y02P 40/57 (2015.11); Y10T 29/49144 (2015.01); Y10T 83/0341 (2015.04);
Abstract

A laser beam machining method and a laser beam machining device capable of cutting a work without producing a fusing and a cracking out of a predetermined cutting line on the surface of the work, wherein at pulse laser beam is radiated on the predetermined cut line on the surface of the work under the conditions causing a multiple photon absorption and with a condensed point aligned to the inside of the work, and a modified area is formed inside the work along the predetermined determined cut line by moving the condensed point along the predetermined cut line, whereby the work can be cut with a rather small force by cracking the work along the predetermined cut line starting from the modified area and, because the pulse laser beam radiated is not almost absorbed onto the surface of the work, the surface is not fused even if the modified area is formed.


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