The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 06, 2020
Filed:
Mar. 08, 2019
Clean Factomation, Inc., Gyeonggi-do, KR;
June Phil Yoon, Seoul, KR;
Jae Won Jang, Asan-si, KR;
CLEAN FACTOMATION, INC., Gyeonggi-Do, KR;
Abstract
Disclosed herein is an equipment front end module (EFEM) including: a transfer chamber; a load port module on which a wafer receiving container is seated; a wafer transfer robot positioned in the transfer chamber and configured to transfer a wafer in the wafer receiving container seated on the load port module toward a process equipment side; and a buffer module configured to store the wafer receiving container before or after the seating of the wafer receiving container on the load port module and inject an inert gas into the FOUP to purge the wafer.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile