The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 06, 2020
Filed:
Oct. 29, 2018
Samsung Display Co., Ltd., Yongin-Si, Gyeonggi-Do, KR;
Haeyoung Yoo, Yongin-si, KR;
Taejong Kim, Yongin-si, KR;
Juhee Lee, Yongin-si, KR;
Myungsoo Huh, Yongin-si, KR;
Jaekyu Park, Yongin-si, KR;
Hyunwoo Joo, Yongin-si, KR;
Samsung Display Co., Ltd., , KR;
Abstract
Provided is a display device manufacturing apparatus and a manufacturing method of a display device. The display device manufacturing apparatus includes: a chamber; a supporter arranged in the chamber and supporting a substrate; an electrode arranged in the chamber so as to face the supporter; a gas supply arranged in the chamber and configured to supply process gas into the chamber; a first baffle arranged at a rim of the supporter and having at least one first through hole; and a second baffle arranged between the first baffle and the chamber and covering the at least one first through hole in a plan view to alter a path of by-products discharged from the chamber.