The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Oct. 06, 2020

Filed:

Oct. 29, 2018
Applicant:

Samsung Display Co., Ltd., Yongin-Si, Gyeonggi-Do, KR;

Inventors:

Haeyoung Yoo, Yongin-si, KR;

Taejong Kim, Yongin-si, KR;

Juhee Lee, Yongin-si, KR;

Myungsoo Huh, Yongin-si, KR;

Jaekyu Park, Yongin-si, KR;

Hyunwoo Joo, Yongin-si, KR;

Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/67 (2006.01); H01J 37/32 (2006.01); H01L 27/12 (2006.01); H01L 21/311 (2006.01); H01L 21/027 (2006.01); H01L 27/32 (2006.01);
U.S. Cl.
CPC ...
H01L 21/67069 (2013.01); H01J 37/32449 (2013.01); H01J 37/32633 (2013.01); H01L 21/0274 (2013.01); H01L 21/31116 (2013.01); H01L 21/31144 (2013.01); H01L 27/1288 (2013.01); H01L 27/3244 (2013.01); H01J 2237/334 (2013.01); H01L 2227/323 (2013.01);
Abstract

Provided is a display device manufacturing apparatus and a manufacturing method of a display device. The display device manufacturing apparatus includes: a chamber; a supporter arranged in the chamber and supporting a substrate; an electrode arranged in the chamber so as to face the supporter; a gas supply arranged in the chamber and configured to supply process gas into the chamber; a first baffle arranged at a rim of the supporter and having at least one first through hole; and a second baffle arranged between the first baffle and the chamber and covering the at least one first through hole in a plan view to alter a path of by-products discharged from the chamber.


Find Patent Forward Citations

Loading…