The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 06, 2020
Filed:
Jan. 21, 2019
Applicant:
Wisconsin Alumni Research Foundation, Madison, WI (US);
Inventors:
Chang-Beom Eom, Madison, WI (US);
Jungwoo Lee, Madison, WI (US);
Assignee:
Wisconsin Alumni Research Foundation, Madison, WI (US);
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/02 (2006.01); H01L 29/24 (2006.01); C23C 14/08 (2006.01); C23C 14/28 (2006.01); H01L 29/778 (2006.01);
U.S. Cl.
CPC ...
H01L 21/02565 (2013.01); C23C 14/088 (2013.01); C23C 14/28 (2013.01); H01L 21/02414 (2013.01); H01L 21/02631 (2013.01); H01L 29/24 (2013.01); H01L 29/778 (2013.01);
Abstract
Methods and systems for forming complex oxide films are provided. Also provided are complex oxide films and heterostructures made using the methods and electronic devices incorporating the complex oxide films and heterostructures. In the methods pulsed laser deposition is conducted in an atmosphere containing a metal-organic precursor to form highly stoichiometric complex oxides.
Eom, Chang-Beom. (2020). Metal-organic pulsed laser deposition for stoichiometric complex oxide thin films (U.S. Patent No. 10796907). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/10796907
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile