The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 06, 2020
Filed:
May. 09, 2018
Applicant:
Robert Bosch Gmbh, Stuttgart, DE;
Inventors:
Benny Pekka Herzogenrath, Wuppertal, DE;
Denis Gugel, Dusslingen, DE;
Rolf Scheben, Reutlingen, DE;
Rudy Eid, Stuttgart, DE;
Assignee:
Robert Bosch GmbH, Stuttgart, DE;
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01P 15/08 (2006.01); B81B 3/00 (2006.01);
U.S. Cl.
CPC ...
G01P 15/08 (2013.01); B81B 3/001 (2013.01); B81B 3/0013 (2013.01); B81B 3/0035 (2013.01); B81B 3/0051 (2013.01); B81B 2201/0235 (2013.01); B81B 2201/0242 (2013.01); B81B 2203/019 (2013.01); B81B 2203/0127 (2013.01); B81B 2203/0361 (2013.01); B81B 2203/0392 (2013.01); B81B 2203/053 (2013.01); G01P 2015/0862 (2013.01); G01P 2015/0871 (2013.01);
Abstract
A microelectromechanical component including, vertically at a distance from one another, a substrate device, a first, a second, and a third functional layer, a vertical stop being formed between the second and third functional layer, the vertical stop having a stop area on a surface of the second functional layer facing the third functional layer, wherein the second functional layer is connected to the first functional layer in a connecting area allocated to the stop area.