The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 06, 2020
Filed:
Sep. 13, 2018
Applicant:
Invensense, Inc., San Jose, CA (US);
Inventors:
Doruk Senkal, San Jose, CA (US);
Houri Johari-Galle, San Jose, CA (US);
Joseph Seeger, Menlo Park, CA (US);
Assignee:
INVENSENSE, INC., San Jose, CA (US);
Primary Examiner:
Int. Cl.
CPC ...
G01C 19/5712 (2012.01); G01C 19/5776 (2012.01); G01C 19/5726 (2012.01); G01C 25/00 (2006.01);
U.S. Cl.
CPC ...
G01C 19/5712 (2013.01); G01C 19/5726 (2013.01); G01C 19/5776 (2013.01); G01C 25/005 (2013.01);
Abstract
A MEMS gyroscope includes a proof mass of a suspended spring mass system that is driven at a drive frequency. The proof mass moves relative to a sense electrode such that an overlap of the proof mass and sense electrode changes during the drive motion. A Coriolis force causes the proof mass to move relative to the sense electrode. The overlap and the movement due to the Coriolis force are sensed, and angular velocity is determined based on the magnitude of a signal generated due to a change in overlap and the Coriolis force.