The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Oct. 06, 2020

Filed:

Jul. 22, 2016
Applicant:

Furuya Metal Co., Ltd., Tokyo, JP;

Inventors:

Tomohiro Maruko, Tokyo, JP;

Keiichiro Jinushi, Tokyo, JP;

Amiko Ito, Tokyo, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 14/34 (2006.01); C23C 14/22 (2006.01); H01J 37/34 (2006.01); C23C 14/35 (2006.01); C23C 14/18 (2006.01); H01J 37/32 (2006.01); H01M 4/88 (2006.01);
U.S. Cl.
CPC ...
C23C 14/223 (2013.01); C23C 14/185 (2013.01); C23C 14/3407 (2013.01); C23C 14/3464 (2013.01); C23C 14/352 (2013.01); H01J 37/32761 (2013.01); H01J 37/3417 (2013.01); H01M 4/8871 (2013.01);
Abstract

A powder coating apparatus which can form a thin film in which freely selected elements are combined without an impurity being mixed and satisfies that a composition of the obtained thin film is uniform. The powder coating apparatus according to the present invention is a powder coating apparatus including a barrel, exhaust device for evacuating an inside of the barrel, and a sputtering device installed inside the barrel, the barrel having a main axis C directed in a horizontal direction and rotating around the main axis, the sputtering device forming a coating film on a surface of powder put in the barrel, in which the sputtering device has one fixing portion for one target to mount two or more targets, and respective targets are disposed in parallel to each other at the same level position with respect to a direction of the main axis when the target is mounted on the fixing portion.


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