The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 29, 2020

Filed:

Jun. 13, 2019
Applicants:

Canon Kabushiki Kaisha, Tokyo, JP;

Fuji Chemical Co., Ltd., Osaka, JP;

Inventors:

Yoshihiro Ohashi, Tokyo, JP;

Yoshinori Kotani, Yokohama, JP;

Motokazu Kobayashi, Yokohama, JP;

Chiemi Shimizu, Hirakata, JP;

Fumio Uchida, Daito, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 41/187 (2006.01); H01L 41/047 (2006.01); B41J 2/14 (2006.01); H01L 41/318 (2013.01); H01L 41/09 (2006.01);
U.S. Cl.
CPC ...
H01L 41/1871 (2013.01); B41J 2/14233 (2013.01); H01L 41/0477 (2013.01); H01L 41/0973 (2013.01); H01L 41/318 (2013.01);
Abstract

Provided is use of an oriented piezoelectric film including of a perovskite-type crystal represented by the following general formula (1): BaCaTiZrO(0≤x≤0.2, 0≤y≤0.2) (1). The oriented piezoelectric film is formed on an oriented underlayer oriented in a (111) plane and contains first crystals oriented in the (111) plane with respect to a film surface and randomly oriented second crystal grains. The first crystal grains have an average grain diameter of from 300 nm to 600 nm and the second crystal grains have an average grain diameter of from 50 nm to 200 nm.


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