The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 29, 2020
Filed:
Dec. 05, 2017
Applicant:
Tdk Corporation, Tokyo, JP;
Inventors:
Assignee:
TDK CORPORATION, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 41/083 (2006.01); H01L 41/08 (2006.01); B41J 2/14 (2006.01); H01L 41/187 (2006.01); H01L 41/047 (2006.01); H01L 41/18 (2006.01); G11B 21/10 (2006.01); H01L 41/09 (2006.01); H01L 41/316 (2013.01); G11B 5/48 (2006.01); H01L 41/113 (2006.01);
U.S. Cl.
CPC ...
H01L 41/0815 (2013.01); B41J 2/14201 (2013.01); B41J 2/14233 (2013.01); H01L 41/0477 (2013.01); H01L 41/18 (2013.01); H01L 41/1873 (2013.01); B41J 2202/03 (2013.01); G11B 5/483 (2015.09); G11B 21/10 (2013.01); H01L 41/094 (2013.01); H01L 41/0973 (2013.01); H01L 41/1132 (2013.01); H01L 41/316 (2013.01);
Abstract
A piezoelectric thin film-stacked body is provided. A piezoelectric thin film-stacked body has a first electrode layer, a first oxide layer stacked on the first electrode layer, a second oxide layer stacked on the first oxide layer, and a piezoelectric thin film stacked on the second oxide layer, the electrical resistivity of the first oxide layer is higher than the electrical resistivity of the second oxide layer, the first oxide layer includes K, Na, and Nb, and the piezoelectric thin film includes (K,Na)NbO.