The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 29, 2020

Filed:

Sep. 06, 2018
Applicant:

Fuji Electric Co., Ltd., Kanagawa, JP;

Inventors:

Makoto Utsumi, Nagano, JP;

Yoshiyuki Sakai, Nagano, JP;

Assignee:

FUJI ELECTRIC CO., LTD., Kanagawa, JP;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 29/45 (2006.01); H01L 21/8234 (2006.01); H01L 29/423 (2006.01); H01L 29/51 (2006.01); H01L 29/739 (2006.01); H01L 29/78 (2006.01); H01L 29/417 (2006.01); H01L 29/40 (2006.01); H01L 29/66 (2006.01); H01L 29/745 (2006.01);
U.S. Cl.
CPC ...
H01L 29/45 (2013.01); H01L 21/823443 (2013.01); H01L 29/401 (2013.01); H01L 29/417 (2013.01); H01L 29/4236 (2013.01); H01L 29/456 (2013.01); H01L 29/51 (2013.01); H01L 29/66348 (2013.01); H01L 29/7397 (2013.01); H01L 29/7813 (2013.01); H01L 29/7396 (2013.01); H01L 29/7455 (2013.01);
Abstract

A semiconductor device includes a first barrier film covering the main surface of the active region and the insulating film layer, the first barrier film having an ohmic contact hole that exposes a contact portion of the ohmic contact formation region within the window of the insulating film layer; a base contact layer filled into the ohmic contact hole and making ohmic contact with the contact portion of the ohmic contact formation region; a second barrier film made of titanium, covering the base contact layer and the first barrier film; and a third barrier film made of titanium oxide and titanium nitride, covering a surface of the second barrier film.


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