The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 29, 2020

Filed:

Nov. 08, 2018
Applicants:

Tsinghua University, Beijing, CN;

Hon Hai Precision Industry Co., Ltd., New Taipei, TW;

Inventors:

Yu-Dan Zhao, Beijing, CN;

Qun-Qing Li, Beijing, CN;

Xiao-Yang Xiao, Beijing, CN;

Guan-Hong Li, Beijing, CN;

Yuan-Hao Jin, Beijing, CN;

Shou-Shan Fan, Beijing, CN;

Assignees:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 27/28 (2006.01); H01L 27/12 (2006.01); H01L 21/8256 (2006.01); H01L 27/092 (2006.01); H01L 27/06 (2006.01); H01L 51/00 (2006.01); H01L 51/05 (2006.01); H01L 51/10 (2006.01);
U.S. Cl.
CPC ...
H01L 27/281 (2013.01); H01L 27/127 (2013.01); H01L 27/1214 (2013.01); H01L 27/283 (2013.01); H01L 51/0048 (2013.01); H01L 51/057 (2013.01); H01L 51/0516 (2013.01); H01L 51/0541 (2013.01); H01L 51/0545 (2013.01); H01L 51/105 (2013.01); H01L 21/8256 (2013.01); H01L 27/0688 (2013.01); H01L 27/092 (2013.01);
Abstract

A method for making a metal oxide semiconductor carbon nanotube thin film transistor circuit. A p-type carbon nanotube thin film transistor and a n-type carbon nanotube thin film transistor are formed on an insulating substrate and stacked with each other. The p-type carbon nanotube thin film transistor includes a first semiconductor carbon nanotube layer, a first drain electrode, a first source electrode, a functional dielectric layer, and a first gate electrode. The n-type carbon nanotube thin film transistor includes a second semiconductor carbon nanotube layer, a second drain electrode, a second source electrode, a first insulating layer, and a second gate electrode. The first drain electrode and the second drain electrode are electrically connected with each other. The first gate electrode and the second gate electrode are electrically connected with each other.


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