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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 10790278 B1

PDFFull Text
Date of Patent:
Sep. 29, 2020

Filed:

Feb. 14, 2019

Semiconductor device including vertical field effect transistors having different gate lengths

Applicant:

Samsung Electronics Co., Ltd., Suwon-si, Gyeonggi-do, KR;

Inventors:

Mingyu Kim, Hwasung-si, KR;

Kang-Ill Seo, Eumseong-gun, KR;

Assignee:

Samsung Electronics Co., Ltd., Gyeonggi-do, KR;

Attorney:

Harness, Dickey & Pierce, P.L.C.

Primary Examiner:

Changhyun Yi

Int. Cl.
CPC ...
H01L 27/088 (2006.01); H01L 29/423 (2006.01); H01L 29/66 (2006.01); H01L 21/8234 (2006.01); H01L 21/308 (2006.01); H01L 29/78 (2006.01);
U.S. Cl.
CPC ...
H01L 27/088 (2013.01); H01L 21/3086 (2013.01); H01L 21/823456 (2013.01); H01L 21/823468 (2013.01); H01L 21/823487 (2013.01); H01L 29/42376 (2013.01); H01L 29/66666 (2013.01); H01L 29/7827 (2013.01);
Abstract

A semiconductor device including a semiconductor substrate having a recessed top portion and a non-recessed top portion, a first fin protruding upward from a non-recessed top portion with a first thickness, a second fin protruding upward from the recessed top portion with a second thickness greater than the first thickness, a first gate structure on the non-recessed top portion and surrounding the first fin to a first height from the non-recessed top portion, and a second gate structure on the recessed top portion and surrounding the second fin to a second height different from the first height from the recessed top portion may be provided.

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