The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 29, 2020
Filed:
Sep. 14, 2018
Lam Research Corporation, Fremont, CA (US);
Benjamin W. Mooring, Austin, TX (US);
Damon Tyrone Genetti, Livermore, CA (US);
Lam Research Corporation, Fremont, CA (US);
Abstract
Each sensor in an array of sensors detects and signals when an edge of a wafer passes by the sensor on a wafer handling component of a robot. A number (N) of detected wafer edge locations is determined. Each detected wafer edge location is a set of coordinates (x, y) in a coordinate system of the wafer handling component. For each unique set of (N−1) of the number (N) of detected wafer edge locations, an estimated wafer offset is determined that substantially minimizes a performance index value. The estimated wafer offset is a vector extending from a center of the coordinate system of the wafer handling component to an estimated center location of the wafer. A final wafer offset is identified as the estimated wafer offset that has a smallest corresponding performance index value. The final wafer offset is used to center the wafer at a target station.