The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 29, 2020
Filed:
Aug. 17, 2017
Applicant:
Screen Holdings Co., Ltd., Kyoto, JP;
Inventor:
Masahito Kashiyama, Kyoto, JP;
Assignee:
SCREEN Holdings Co., Ltd., , JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/67 (2006.01); F04B 43/02 (2006.01); F04B 9/02 (2006.01); F04B 53/14 (2006.01); F04B 13/00 (2006.01); F04B 23/06 (2006.01); F04B 43/04 (2006.01); B05C 5/00 (2006.01); B05C 11/10 (2006.01);
U.S. Cl.
CPC ...
H01L 21/67023 (2013.01); F04B 9/02 (2013.01); F04B 13/00 (2013.01); F04B 23/06 (2013.01); F04B 43/02 (2013.01); F04B 43/025 (2013.01); F04B 43/04 (2013.01); F04B 53/14 (2013.01); H01L 21/6708 (2013.01); H01L 21/67253 (2013.01); B05C 5/00 (2013.01); B05C 11/10 (2013.01); H01L 21/67017 (2013.01); H01L 21/67051 (2013.01);
Abstract
A drive mechanism deforms two diaphragms to perform alternate increase and decrease in volume of a supply chamber. At this time, the two diaphragms are provided for the single supply chamber. This leads to possibility of suction and feed out of a desired amount of liquid even with limited deformation of the diaphragms. In addition, the two diaphragms achieve suppression in deformation thereof upon suction and feed out of a desired amount of liquid. This allows selection of the diaphragms each with a short stroke, yielding suppressed stagnation and quality degradation of the liquid.