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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 10790165 B1

PDFFull Text
Expired
Date of Patent:
Sep. 29, 2020

Filed:

Aug. 17, 2017

Pump apparatus and substrate treating apparatus

Applicant:

Screen Holdings Co., Ltd., Kyoto, JP;

Inventor:

Masahito Kashiyama, Kyoto, JP;

Assignee:

SCREEN Holdings Co., Ltd., , JP;

Attorney:

Ostrolenk Faber LLP

Primary Examiner:

David G Cormier

Int. Cl.
CPC ...
H01L 21/67 (2006.01); F04B 43/02 (2006.01); F04B 9/02 (2006.01); F04B 53/14 (2006.01); F04B 13/00 (2006.01); F04B 23/06 (2006.01); F04B 43/04 (2006.01); B05C 5/00 (2006.01); B05C 11/10 (2006.01);
U.S. Cl.
CPC ...
H01L 21/67023 (2013.01); F04B 9/02 (2013.01); F04B 13/00 (2013.01); F04B 23/06 (2013.01); F04B 43/02 (2013.01); F04B 43/025 (2013.01); F04B 43/04 (2013.01); F04B 53/14 (2013.01); H01L 21/6708 (2013.01); H01L 21/67253 (2013.01); B05C 5/00 (2013.01); B05C 11/10 (2013.01); H01L 21/67017 (2013.01); H01L 21/67051 (2013.01);
Abstract

A drive mechanism deforms two diaphragms to perform alternate increase and decrease in volume of a supply chamber. At this time, the two diaphragms are provided for the single supply chamber. This leads to possibility of suction and feed out of a desired amount of liquid even with limited deformation of the diaphragms. In addition, the two diaphragms achieve suppression in deformation thereof upon suction and feed out of a desired amount of liquid. This allows selection of the diaphragms each with a short stroke, yielding suppressed stagnation and quality degradation of the liquid.

Find Patent Forward Citations

Kashiyama, Masahito. (2020). Pump apparatus and substrate treating apparatus (U.S. Patent No. 10790165). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/10790165

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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