The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 29, 2020
Filed:
May. 04, 2018
Applicant:
Hermes-epitek Corp., Taipei, TW;
Inventors:
Wen-Yuan Hsu, Hsinchu, TW;
Shih-Ying Chou, Hsinchu, TW;
Assignee:
HERMES-EPITEK CORP., Taipei, TW;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01R 1/44 (2006.01); G01R 31/26 (2020.01); G01R 31/28 (2006.01); G01R 1/04 (2006.01);
U.S. Cl.
CPC ...
G01R 1/44 (2013.01); G01R 31/2601 (2013.01); G01R 31/2865 (2013.01); G01R 31/2874 (2013.01); G01R 1/04 (2013.01); G01R 31/2875 (2013.01); G01R 31/2877 (2013.01);
Abstract
A semiconductor test apparatus includes a test chamber, a chuck and a refrigeration element. The chuck is arranged in the test chamber to fix a semiconductor element to be tested. The refrigeration element is connected to the test chamber to reduce a chamber ambient temperature of the test chamber from a first temperature to a second temperature. The foregoing semiconductor test apparatus is able to reduce the chamber ambient temperature of the test chamber to be equal to or lower than the specified test temperature.