The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 29, 2020

Filed:

Dec. 22, 2016
Applicant:

Commissariat a L'energie Atomique ET Aux Energies Alternatives, Paris, FR;

Inventors:

Valeria Toffoli, Grenoble, FR;

Thomas Alava, Grenoble, FR;

Bertrand Bourlon, Saint Martin le Vinoux, FR;

Eric Ollier, Grenoble, FR;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01N 30/00 (2006.01); G01N 30/95 (2006.01); G01N 25/48 (2006.01); G01N 5/04 (2006.01); G01N 33/00 (2006.01);
U.S. Cl.
CPC ...
G01N 30/95 (2013.01); G01N 5/04 (2013.01); G01N 25/4833 (2013.01); G01N 33/0016 (2013.01); G01N 33/0029 (2013.01); G01N 33/0031 (2013.01); G01N 33/0059 (2013.01);
Abstract

A microelectromechanical gas sensor including a fixed part, at least one suspended part in relation to fixed part, at least one sensitive zone carried on the suspended part, the sensitive zone being able to adsorb/absorb and desorb gaseous species or families of gaseous species, a heater for heating at least the sensitive zone, a detector for detecting the adsorption/absorption and desorption of gaseous species or families of gaseous species on the sensitive zone, a controller of controlling the heater so that the heating is applied to at least the sensitive zone with one or more temperature profiles ensuring the adsorption/absorption and desorption of the gaseous species in a controlled manner so as to obtain an individual desorption of each species or families of gaseous species.


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