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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 10788076 B1

PDFFull Text
Date of Patent:
Sep. 29, 2020

Filed:

Dec. 24, 2014

Rotation mechanism, machine tool, and semiconductor manufacturing device

Applicant:

Nsk Ltd., Shinagawa-ku, Tokyo, JP;

Inventor:

Tsuyoshi Nakamura, Kanagawa, JP;

Assignee:

NSK LTD., Shinagawa-ku, Tokyo, JP;

Attorney:

Sughrue Mion, PLLC

Primary Examiner:

Hemant Desai

Assistant Examiner:

Veronica Martin

Int. Cl.
CPC ...
F16C 41/00 (2006.01); F16C 19/54 (2006.01); H01L 21/687 (2006.01); H02K 5/173 (2006.01); F16C 32/06 (2006.01); F16C 39/04 (2006.01); H02K 5/16 (2006.01); H02K 5/124 (2006.01); H02K 9/04 (2006.01); F16C 21/00 (2006.01); F16J 15/40 (2006.01); F16C 17/08 (2006.01); B23Q 11/08 (2006.01); B23Q 1/70 (2006.01); B23Q 11/00 (2006.01); H01L 21/683 (2006.01); H02K 9/14 (2006.01);
U.S. Cl.
CPC ...
F16C 41/005 (2013.01); B23Q 1/70 (2013.01); B23Q 11/0046 (2013.01); B23Q 11/0883 (2013.01); F16C 17/08 (2013.01); F16C 19/543 (2013.01); F16C 21/00 (2013.01); F16C 32/0614 (2013.01); F16C 32/0622 (2013.01); F16C 32/0692 (2013.01); F16C 39/04 (2013.01); F16J 15/40 (2013.01); H01L 21/6838 (2013.01); H01L 21/68792 (2013.01); H02K 5/124 (2013.01); H02K 5/16 (2013.01); H02K 5/1735 (2013.01); H02K 9/04 (2013.01); H02K 9/14 (2013.01); F16C 2235/00 (2013.01); F16C 2300/22 (2013.01); F16C 2322/39 (2013.01); F16C 2380/18 (2013.01);
Abstract

A rotation mechanism includes: a housing; a shaft inserted through a hole provided at the housing; bearings installed at the housing and rotatably supporting the shaft; a rotary member provided at one end portion of the shaft, adapted to be rotated together with the shaft, and having a portion that projects to a radially outer side of the hole and faces the housing with a gap having a predetermined size; and a gas passage adapted to connect the gap to outside of the housing and allow gas contained in a portion of the gap to pass to the outside of the housing.

Find Patent Forward Citations

Nakamura, Tsuyoshi. (2020). Rotation mechanism, machine tool, and semiconductor manufacturing device (U.S. Patent No. 10788076). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/10788076

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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