The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 29, 2020
Filed:
Jan. 17, 2017
Basf SE, Ludwigshafen am Rhein, DE;
Falko Abels, Ludwigshafen, DE;
Daniel Loeffler, Ludwigshafen, DE;
Hagen Wilmer, Ludwigshafen, DE;
Robert Wolf, Regensburg, DE;
Christian Roedl, Regensburg, DE;
Philipp Bueschelberger, Regensburg, DE;
BASF SE, Ludwigshafen am Rhein, DE;
Abstract
Processes for the generation of thin inorganic films on substrates, in particular atomic layer deposition processes. In particular, a process of bringing a compound of general formula (I) into the gaseous or aerosol stateL- - - M - - - X  (I)and depositing the compound of general formula (I) from the gaseous or aerosol state onto a solid substrate, whereinM is a metal,L is a ligand which coordinates to M and contains at least one phosphorus-carbon multiple bond, wherein L contains a phosphorus-containing heterocyclic ring or a phosphorus-carbon triple bond,X is a ligand which coordinates to M,n is 1 to 5, andm is 0 to 5.