The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 29, 2020

Filed:

Mar. 02, 2017
Applicant:

Tanaka Kikinzoku Kogyo K.k., Chiyoda-ku, Tokyo, JP;

Inventors:

Yasuyuki Goto, Tsukuba, JP;

Takamichi Yamamoto, Tsukuba, JP;

Masahiro Nishiura, Tsukuba, JP;

Ryousuke Kushibiki, Tsukuba, JP;

Assignee:
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
C23C 14/34 (2006.01); C23C 14/14 (2006.01); B22F 3/14 (2006.01); C22C 5/04 (2006.01); H01J 37/34 (2006.01); C22C 1/04 (2006.01); G11B 5/851 (2006.01); C22C 38/00 (2006.01); B22F 3/15 (2006.01); B22F 1/00 (2006.01);
U.S. Cl.
CPC ...
C23C 14/14 (2013.01); B22F 3/14 (2013.01); C22C 1/04 (2013.01); C22C 5/04 (2013.01); C22C 38/00 (2013.01); C23C 14/34 (2013.01); G11B 5/851 (2013.01); H01J 37/3426 (2013.01); B22F 1/00 (2013.01); B22F 3/15 (2013.01); B22F 2301/25 (2013.01);
Abstract

Through the present invention, a thin film containing an FePt-based alloy and carbon, the thin film being capable of being used as a magnetic recording medium, is enabled to be formed using one target, and amount of particles is enabled to be reduced. An FePt—C-based sputtering target containing Fe, Pt, and C, wherein the FePt—C-based sputtering target has a structure in which a C phase substantially being C is dispersed in an FePt-based alloy phase containing 33 mol % or more and 60 mol % or less of Pt with the balance substantially being Fe, an average value of the size indices a of the C phase is 4.0 μm or more and 9.0 μm or less, and an average value of the nonspherical indices b of the C phase is 3.0 or more.


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