The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 29, 2020

Filed:

May. 17, 2017
Applicants:

Boe Technology Group Co., Ltd., Beijing, CN;

Ordos Yuansheng Optoelectronics Co., Ltd., Inner Mongolia, CN;

Inventors:

Zhiming Lin, Beijing, CN;

Zhen Wang, Beijing, CN;

Jian Zhang, Beijing, CN;

Fuqiang Tang, Beijing, CN;

Chunchieh Huang, Beijing, CN;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 14/04 (2006.01); C23C 14/24 (2006.01); B05D 1/32 (2006.01); B05C 21/00 (2006.01); H01L 21/308 (2006.01); H01L 51/00 (2006.01);
U.S. Cl.
CPC ...
C23C 14/042 (2013.01); B05C 21/005 (2013.01); B05D 1/32 (2013.01); C23C 14/24 (2013.01); B05D 1/327 (2013.01); H01L 21/308 (2013.01); H01L 21/3083 (2013.01); H01L 51/0011 (2013.01);
Abstract

The embodiments of the present disclosure provide a mask assembly, an installation method thereof and an evaporation apparatus. The mask assembly includes: a support frame; a mask fixed on the support frame, the mask including an active mask region and an inactive mask region surrounding the active mask region; and a first support bar fixed on the support frame. The first support bar is disposed on a side of the mask facing away from the support frame, a projection of the first support bar onto a plane where the support frame is located is overlapped with a projection of the mask onto the plane where the support frame is located by a first overlapping portion, and the first overlapping portion is located within a projection area of the inactive mask region onto the plane where the support frame is located.


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