The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 29, 2020
Filed:
Jul. 19, 2018
Applicant:
Showa Denko K.k., Tokyo, JP;
Inventors:
Daisuke Miyamoto, Shiojiri, JP;
Kosuke Shioi, Tochigi, JP;
Assignee:
SHOWA DENKO K.K., Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C04B 35/581 (2006.01); C04B 35/64 (2006.01); H01L 23/15 (2006.01); H01L 23/373 (2006.01); C04B 35/626 (2006.01); C04B 35/63 (2006.01); C04B 35/634 (2006.01); C04B 35/638 (2006.01); H01L 21/48 (2006.01);
U.S. Cl.
CPC ...
C04B 35/581 (2013.01); C04B 35/6264 (2013.01); C04B 35/6303 (2013.01); C04B 35/638 (2013.01); C04B 35/6342 (2013.01); C04B 35/64 (2013.01); H01L 21/4807 (2013.01); H01L 23/15 (2013.01); H01L 23/3731 (2013.01); C04B 2235/3217 (2013.01); C04B 2235/3225 (2013.01); C04B 2235/3865 (2013.01); C04B 2235/6025 (2013.01); C04B 2235/658 (2013.01); C04B 2235/6567 (2013.01); C04B 2235/786 (2013.01); C04B 2235/85 (2013.01);
Abstract
An aluminum nitride sintered compact containing aluminum nitride crystal grains and composite oxide crystal grains containing a rare earth element and an aluminum element, wherein a median diameter of the aluminum nitride crystal grains is 2 μm or less; 10 to 200 intergrain voids having a longest diameter of 0.2 to 1 μm are dispersed in a region of a cross section of 100 μm in square; and the carbon atom content is less than 0.10% by mass. Also disclosed is a method of producing the aluminum nitride sintered compact.