The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 29, 2020

Filed:

Sep. 27, 2018
Applicant:

Teledyne Digital Imaging Us, Inc., Billerica, MA (US);

Inventors:

John C. Vines, Dallas, TX (US);

John Laessle, Plano, TX (US);

Assignee:

TELEDYNE DIGITAL IMAGING US, INC., Billerica, MA (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B01D 19/00 (2006.01); G05B 19/048 (2006.01); F04B 53/22 (2006.01); F04B 53/06 (2006.01); F04B 49/22 (2006.01); F04B 49/10 (2006.01); F04B 43/107 (2006.01); F04B 43/073 (2006.01); F04B 43/067 (2006.01); F04B 43/06 (2006.01); F04B 43/04 (2006.01); F04B 35/00 (2006.01); F04B 17/03 (2006.01); F04B 13/00 (2006.01); F04B 43/113 (2006.01);
U.S. Cl.
CPC ...
B01D 19/0063 (2013.01); B01D 19/0073 (2013.01); F04B 13/00 (2013.01); F04B 17/03 (2013.01); F04B 35/00 (2013.01); F04B 43/04 (2013.01); F04B 43/06 (2013.01); F04B 43/067 (2013.01); F04B 43/073 (2013.01); F04B 43/107 (2013.01); F04B 49/10 (2013.01); F04B 49/22 (2013.01); F04B 53/06 (2013.01); F04B 53/22 (2013.01); G05B 19/048 (2013.01); F04B 43/113 (2013.01); Y10T 29/49236 (2015.01);
Abstract

A precision pump system is described that includes a motor driver for accurately and repeatedly delivering process fluid, and uses a pumping fluid with minimal process fluid loss to a fabrication process. A method for automatically evacuating gas from the process fluid to be dispensed as part of a recirculation process is also described.


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