The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 22, 2020

Filed:

Jan. 15, 2018
Applicant:

3m Innovative Properties Company, St. Paul, MN (US);

Inventors:

Thomas P. Klun, Lakeland, MN (US);

Suresh Iyer, Woodbury, MN (US);

Alan K. Nachtigal, Maplewood, MN (US);

Joseph C. Spagnola, Woodbury, MN (US);

Mark A. Roehrig, Stillwater, MN (US);

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 51/44 (2006.01); B32B 27/08 (2006.01); B32B 27/30 (2006.01); B32B 27/36 (2006.01); C23C 16/44 (2006.01); H01L 31/0203 (2014.01); H01L 51/52 (2006.01); C23C 28/04 (2006.01); C23C 16/30 (2006.01); C23C 28/00 (2006.01); H01L 31/048 (2014.01); C08J 7/04 (2020.01); H01L 33/56 (2010.01); B32B 37/24 (2006.01);
U.S. Cl.
CPC ...
H01L 51/448 (2013.01); B32B 27/08 (2013.01); B32B 27/308 (2013.01); B32B 27/36 (2013.01); C08J 7/0423 (2020.01); C23C 16/30 (2013.01); C23C 16/44 (2013.01); C23C 28/00 (2013.01); C23C 28/042 (2013.01); H01L 31/0203 (2013.01); H01L 31/0481 (2013.01); H01L 51/5256 (2013.01); B32B 2037/243 (2013.01); B32B 2457/20 (2013.01); C08J 2367/02 (2013.01); C08J 2433/12 (2013.01); C08J 2483/07 (2013.01); H01L 33/56 (2013.01);
Abstract

A barrier film including a substrate, a base (co)polymer layer applied on a major surface of the substrate, an oxide layer applied on the base (co)polymer layer, and a protective (co)polymer layer applied on the oxide layer. The protective (co)polymer layer is formed as the reaction product of a first (meth)acryloyl compound and a (meth)acryl-silane compound derived from a Michael reaction between a second (meth)acryloyl compound and an aminosilane. The first and second (meth)acryloyl compounds may be the same. In some embodiments, a multiplicity of alternating layers of the oxide layer and the protective (co)polymer layer may be used. An oxide layer can be applied over the top protective (co)polymer layer. The barrier films provide, in some embodiments, enhanced resistance to moisture and improved peel strength adhesion of the protective (co)polymer layer(s) to the underlying layers. A process of making, and methods of using the barrier film are also described.


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