The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 22, 2020

Filed:

Feb. 05, 2018
Applicant:

Seiko Epson Corporation, Tokyo, JP;

Inventor:

Yasuhiro Itayama, Chino, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 41/09 (2006.01); H01L 41/107 (2006.01); H01L 41/113 (2006.01); B06B 1/06 (2006.01); H01L 41/27 (2013.01); H01L 41/053 (2006.01); H01L 41/047 (2006.01); G01H 7/00 (2006.01); G01L 9/00 (2006.01);
U.S. Cl.
CPC ...
H01L 41/1132 (2013.01); B06B 1/06 (2013.01); B06B 1/0629 (2013.01); G01H 7/00 (2013.01); G01L 9/0022 (2013.01); H01L 41/047 (2013.01); H01L 41/053 (2013.01); H01L 41/27 (2013.01);
Abstract

A transmitting piezoelectric element and receiving piezoelectric elements and are arranged on a vibrating plate opposed to each opening of openings of a piezoelectric sensor, and, when an external force is applied in a vertical direction with respect to the vibrating plate opposed to the openings, a region which has a maximum principal stress which is a maximum value of the stress of the vibrating plate is a first region, and a region which has a minimum principal stress which is a minimum value of the stress of the vibrating plate is a second region, the receiving piezoelectric elements and are arranged in the first region and the transmitting piezoelectric element is arranged in the second region.


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