The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 22, 2020

Filed:

Aug. 10, 2018
Applicant:

Hamamatsu Photonics K.k., Hamamatsu-shi, Shizuoka, JP;

Inventors:

Hiroyasu Fujiwara, Hamamatsu, JP;

Wei Dong, Hamamatsu, JP;

Kazutoshi Nakajima, Hamamatsu, JP;

Shohei Hayashi, Hamamatsu, JP;

Assignee:

HAMAMATSU PHOTONICS K.K., Hamamatsu-shi, Shizuoka, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 31/08 (2006.01); H01L 31/02 (2006.01); H01L 31/0352 (2006.01); H01L 31/07 (2012.01); H01L 31/10 (2006.01); H01L 31/108 (2006.01); H01L 31/101 (2006.01); H01L 31/0232 (2014.01); H01L 31/0224 (2006.01);
U.S. Cl.
CPC ...
H01L 31/108 (2013.01); H01L 31/02327 (2013.01); H01L 31/022408 (2013.01); H01L 31/03529 (2013.01); H01L 31/07 (2013.01); H01L 31/1013 (2013.01);
Abstract

A photodetection element is a photodetection element having an incidence surface for light on a back surface of a semiconductor layer, and includes a periodic nano-concave/convex structure provided on a front surface of the semiconductor layer and having convex portions and concave portions constituting a longitudinal resonator and a transverse resonator for the light incident from the incidence surface, the periodic nano-concave/convex structure converting the light into surface plasmons, and a metal film provided to cover the periodic nano-concave/convex structure, a height and an arrangement pitch of the convex portions in the periodic nano-concave/convex structure are set such that a resonance wavelength of the longitudinal resonator and a resonance wavelength of the transverse resonator match, and a thickness of the metal film is equal to or greater than 20 nm.


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