The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 22, 2020

Filed:

Feb. 26, 2018
Applicant:

Screen Holdings Co., Ltd., Kyoto, JP;

Inventors:

Kazuhiko Fuse, Kyoto, JP;

Shinji Miyawaki, Kyoto, JP;

Takahiro Kitazawa, Kyoto, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/26 (2006.01); H01L 21/324 (2006.01); H01L 21/67 (2006.01); G01J 5/00 (2006.01); G01J 5/02 (2006.01); G01J 5/04 (2006.01); G01K 13/00 (2006.01); H01L 21/687 (2006.01);
U.S. Cl.
CPC ...
H01L 21/67115 (2013.01); G01J 5/0007 (2013.01); G01J 5/0205 (2013.01); G01J 5/0275 (2013.01); G01J 5/047 (2013.01); H01L 21/67109 (2013.01); H01L 21/67248 (2013.01); H01L 21/6875 (2013.01); H01L 21/68707 (2013.01); H01L 21/68742 (2013.01); H01L 21/68785 (2013.01);
Abstract

A pyrometer holder is mounted to an outer wall of a chamber while holding a lower radiation thermometer. The front end of the lower radiation thermometer is brought into abutment with a mounting portion of the pyrometer holder, and a bottom plate is brought into abutment with the rear end of the lower radiation thermometer. A tension spring is tensioned between the bottom plate and the mounting portion to prevent the lower radiation thermometer from falling off or misregistration. An angle adjusting mechanism adjusts the angle of the radiation thermometer with respect to the outer wall of the chamber, with the front end of the radiation thermometer serving as a supporting point. Thus, the measurement position of the lower radiation thermometer is adjusted.


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