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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 10782710 B1

PDFFull Text
Date of Patent:
Sep. 22, 2020

Filed:

Apr. 15, 2019

Flow control system, method, and apparatus

Applicant:

Reno Technologies, Inc., Wilmington, DE (US);

Inventors:

Daniel T. Mudd, Reno, NV (US);

Marshall B. Grill, Reno, NV (US);

Norman L. Batchelor, II, Sparks, NV (US);

Assignee:

ICHOR SYSTEMS, INC.;

Attorney:

The Belles Group, P.C.

Primary Examiner:

Clayton E LaBalle

Assistant Examiner:

Warren K Fenwick

Int. Cl.
CPC ...
G05D 7/06 (2006.01); G01F 1/684 (2006.01); F16K 27/00 (2006.01); G01F 15/00 (2006.01); H01L 21/205 (2006.01);
U.S. Cl.
CPC ...
G05D 7/0682 (2013.01); F16K 27/003 (2013.01); G01F 1/6842 (2013.01); G01F 1/6847 (2013.01); G01F 15/002 (2013.01); G05D 7/0635 (2013.01); H01L 21/205 (2013.01);
Abstract

A mass flow control apparatus having a monolithic base. The monolithic base has a gas inlet, a gas outlet, a first flow component mounting region, a second flow component mounting region, and a third flow component mounting region. The first flow component mounting region has a first inlet port and a first outlet port, the first inlet port being fluidly coupled to the gas inlet of the monolithic base. The second flow component mounting region has a second inlet port, a second outlet port, and a first auxiliary port.

Find Patent Forward Citations

Mudd, Daniel. (2020). Flow control system, method, and apparatus (U.S. Patent No. 10782710). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/10782710

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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