The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 22, 2020

Filed:

Jun. 29, 2018
Applicant:

Seiko Epson Corporation, Tokyo, JP;

Inventor:

Nozomu Hirokubo, Fujimi, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G02B 5/28 (2006.01); G05B 11/14 (2006.01); H02N 1/00 (2006.01); G01J 3/26 (2006.01); G02B 26/00 (2006.01); G01J 3/10 (2006.01); G01J 3/02 (2006.01); G01J 3/50 (2006.01);
U.S. Cl.
CPC ...
G05B 11/14 (2013.01); G01J 3/027 (2013.01); G01J 3/10 (2013.01); G01J 3/26 (2013.01); G01J 3/505 (2013.01); G02B 5/286 (2013.01); G02B 5/288 (2013.01); G02B 26/001 (2013.01); H02N 1/006 (2013.01); B81B 2201/031 (2013.01);
Abstract

An actuator apparatus includes a pair of substrates facing each other; a plurality of bias actuators that each vary a gap dimension of a gap between the pair of substrates; a gap detection portion that detects the gap dimension; and a voltage control unit that controls driving of each of the bias actuators on the basis of the detected gap dimension. The bias actuators are located asymmetric relative to a driving central axis and are mutually independently driven; and the voltage control unit derives driving parameters for use in driving the bias actuators, on the basis of voltages and gap dimensions obtained by sequentially switching and driving the bias actuators on by one.


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